Focused Ion Beam Nano-structuring of Bragg Gratings in Al2O3 Channel Waveguides
نویسندگان
چکیده
We report our recent results on an optimization study of focused ion beam (FIB) nano-structuring of Bragg gratings in Al2O3 channel waveguides. By optimizing FIB milling parameters such as ion current, dwell time, loop repetitions, scanning strategy, and applying a top metal layer for reducing charging effects and improving sidewall definition, reflection gratings with smooth and uniform sidewalls were achieved.
منابع مشابه
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